Effects of laser pulse duration on the formation dynamics of laser-induced periodic nanostructures.

Formation dynamics of laser-induced periodic surface structures (LIPSSs) on the SiC substrates were described with varying pulse numbers and pulse duration. As the number of laser pulses increases, two significant transformations become evident in the progression of structural formations. First from surface roughening with nanoparticles to LIPSS with the period that is slightly shorter than the laser wavelength. Second it turns to LIPSS with a period less than half the laser wavelength. It is found that maintaining the crystallinity is the key to changing the structures. In the cases of longer pulse width than sub-nanoseconds, no LIPSS formations are observed or LSFL does not change to HSFL because the irradiated area is poly-crystallized.

Crystallinity in periodic nanostructure surface on Si substrates induced by near- and mid-infrared femtosecond laser irradiation.

Laser-induced periodic surface structure (LIPSS), which has a period smaller than the laser wavelength, is expected to become a potential technique for fine surface processing. We report the microscopic and macroscopic observations of the crystallinity of LIPSSs, where the characteristics such as defects generation and residual strain were analyzed, respectively. The LIPSSs were formed on a Si substrate using two different femtosecond pulses from Ti:Sapphire laser with near-infrared wavelength (0.8 µm) and free-electron laser (FEL) with mid-infrared wavelength (11.4 µm). The photon energies of the former and latter lasers used here are higher and lower than the Si bandgap energies, respectively. These LIPSSs exhibit different crystalline states, where LIPSS induced by Ti:Sapphire laser show residual strain while having a stable crystallinity; in contrast, FEL-LIPSS generates defects without residual strain. This multiple analysis (microscopic and macroscopic observations) provides such previously-unknown structural characteristics with high spatial resolution. To obtain LIPSS with suitable properties and characteristics based on each application it is paramount to identify the laser sources that can achieve such properties. Therefore, identifying the structural information of the LIPSS generated by each specific laser is of great importance.